(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films)
Possibly impaired function (see product description for details).
May be missing useful parts.
SCRAP
Item is for spare parts only.
Manufacturer:
MKS/Brooks Instrument
Reference #:
BFB 124 005
Weight:
0.80625lb (0.3657 kg)
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