Valves/Fittings

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USED Control Valve MKS 251 Brooks 5835C9Z5E1 0-2000 SCCM

USED, salvaged from school surplus equipment, no spec sheet, made in USA.

Listing is for one (1) each control valve, MKS Type 251, Brooks Model 5835C9Z5E1, comes exactly as shown in the photo.

• Gas: Chlorine
• Range: 0-2000 SCCM
• 5/16-24 316 Stainless Steel Fittings

(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films)
Availability: 1 In stock
Item condition:
  • LIKE NEW
  • VERY GOOD
  • GOOD
  • POOR
  • SCRAP
Manufacturer:
MKS/Brooks Instrument
Reference #:BFB 124 006
Weight: 0.8 lb (0.3629 kg)
U.S. shipping only at this time. Choose USPS Priority Mail shipping to receive this item between Saturday, December 11th and Tuesday, December 14th. (Delivery times are best estimates.)

Note: Packages may experience unexpected delays during transit due to holiday traffic. Shipping times cannot be guaranteed.

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$63.98

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