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Information
For convenience,
products are pictured
on a 1" x 1" grid.
USED Control Valve MKS 251 Brooks 5835C9Z5E1 0-2000 SCCM
USED, salvaged from school surplus equipment, no spec sheet, made in USA.
Listing is for one (1) each control valve, MKS Type 251, Brooks Model 5835C9Z5E1, comes exactly as shown in the photo.
• Gas: Chlorine
• Range: 0-2000 SCCM
• 5/16-24 316 Stainless Steel Fittings
(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films)
Listing is for one (1) each control valve, MKS Type 251, Brooks Model 5835C9Z5E1, comes exactly as shown in the photo.
• Gas: Chlorine
• Range: 0-2000 SCCM
• 5/16-24 316 Stainless Steel Fittings
(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films)
| Availability: | 1 In stock | ||
| |||
| Manufacturer: | MKS/Brooks Instrument | ||
| Reference #: | BFB 124 006 | ||
| Weight: | 0.8 lb (0.3629 kg) | ||
U.S. shipping only at this time. Choose USPS Ground Advantage shipping to receive this item between Saturday, May 11th and Wednesday, May 15th. (Delivery times are best estimates.)
To ask us a question about this product, click here.
