(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films).
Possibly impaired function (see product description for details).
May be missing useful parts.
SCRAP
Item is for spare parts only.
Manufacturer:
MKS/Brooks Instrument
Reference #:
BFB 124 008
Weight:
0.8lb (0.3629 kg)
U.S. shipping only at this time. Choose USPS Ground Advantage shipping to receive this item between Tuesday, April 23rd and Friday, April 26th. (Delivery times are best estimates.)
To ask us a question about this product, click here.