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USED Mass Flow Meter Tylan FM-360 100-SCCM Air 500PSIG
USED, salvaged from school surplus equipment, no spec sheet, made in USA.
Listing is for one (1) each mass flow meter, Tylan model FM-360, 100-SCCM Air, 500PSIG Max, 9/16-18 316 stainless steel fittings, comes exactly as shown in the photo.
(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films.)
Possibly impaired function (see product description for details).
May be missing useful parts.
SCRAP
Item is for spare parts only.
Manufacturer:
Tylan Corporation
Reference #:
BFB 124 004
Weight:
1.05lb (0.4763 kg)
U.S. shipping only at this time. Choose USPS Ground Advantage shipping to receive this item between Monday, November 25th and Friday, November 29th. (Delivery times are best estimates.)
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