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USED Mass Flow Meter Tylan FM-360 2-SLPM N2 Gas 500PSIG
USED, salvaged from school surplus equipment, no spec sheet, made in USA.
Listing is for one (1) each mass flow meter, Tylan model FM-360, 2-SLPM N2 Gas, 500PSIG Max, 9/16-18 316 stainless steel fittings, comes exactly as shown in the photo.
(Salvaged from a Drytek DRIE-100 cassette planar plasma wafer etcher which uses chlorine and fluorine based chemistries for etching Si, polysilicon, nitride tungsten, tungsten silicide films.)
Possibly impaired function (see product description for details).
May be missing useful parts.
SCRAP
Item is for spare parts only.
Manufacturer:
Tylan Corporation
Reference #:
BFB 124 001
Weight:
1.05lb (0.4763 kg)
U.S. shipping only at this time. Choose USPS Ground Advantage shipping to receive this item between Wednesday, November 27th and Monday, December 2nd. (Delivery times are best estimates.)
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